On the transformation of “zincone”-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition
نویسندگان
چکیده
منابع مشابه
Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
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متن کاملIntroduction to (plasma-enhanced) atomic layer deposition
Film growth by the atomic layer deposition (ALD) method relies on alternate pulsing of the precursor gases and vapors into a vacuum chamber and their subsequent chemisorption on the substrate surface (Fig. 1) [1,2]. The different steps in the process are saturative such that ALD film growth is self-limiting yielding one submonolayer of film per deposition cycle. ALD has some unique characterist...
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ژورنال
عنوان ژورنال: Beilstein Journal of Nanotechnology
سال: 2019
ISSN: 2190-4286
DOI: 10.3762/bjnano.10.74